Fokusthemen
Publikationen
Services
Autorinnen/Autoren
Verlag
Shop
LEXIA
Zeitschriften
SachbuchLOKISemaphor
Osteraktion: Bis zum 30.4.2025 von 20% Rabatt auf folgende Produkte profitieren. Code: NEST25
Design and Manufacturing of Active Microsystems

Design and Manufacturing of Active Microsystems

Inhalt

This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems.

Bibliografische Angaben

März 2014, 444 Seiten, Microtechnology and MEMS, Englisch
Springer Nature EN
978-3-642-26738-3

Inhaltsverzeichnis

Schlagworte

Weitere Titel der Reihe: Microtechnology and MEMS

Alle anzeigen

Weitere Titel zum Thema