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High-k Materials in Multi-Gate FET Devices

High-k Materials in Multi-Gate FET Devices

Contenu

This book focuses on high-k materials for advanced FET devices. It discusses emerging challenges in the engineering and applications and considers issues with associated technologies.

Informations bibliographiques

septembre 2023, 164 Pages, Science, Technology, and Management, Anglais
Taylor and Francis
978-0-367-63969-3

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